JPH0265858U - - Google Patents

Info

Publication number
JPH0265858U
JPH0265858U JP14616688U JP14616688U JPH0265858U JP H0265858 U JPH0265858 U JP H0265858U JP 14616688 U JP14616688 U JP 14616688U JP 14616688 U JP14616688 U JP 14616688U JP H0265858 U JPH0265858 U JP H0265858U
Authority
JP
Japan
Prior art keywords
ion source
source chamber
magnetic field
coil
waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14616688U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0644007Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14616688U priority Critical patent/JPH0644007Y2/ja
Publication of JPH0265858U publication Critical patent/JPH0265858U/ja
Application granted granted Critical
Publication of JPH0644007Y2 publication Critical patent/JPH0644007Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP14616688U 1988-11-09 1988-11-09 イオン処理装置 Expired - Lifetime JPH0644007Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14616688U JPH0644007Y2 (ja) 1988-11-09 1988-11-09 イオン処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14616688U JPH0644007Y2 (ja) 1988-11-09 1988-11-09 イオン処理装置

Publications (2)

Publication Number Publication Date
JPH0265858U true JPH0265858U (en]) 1990-05-17
JPH0644007Y2 JPH0644007Y2 (ja) 1994-11-14

Family

ID=31415402

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14616688U Expired - Lifetime JPH0644007Y2 (ja) 1988-11-09 1988-11-09 イオン処理装置

Country Status (1)

Country Link
JP (1) JPH0644007Y2 (en])

Also Published As

Publication number Publication date
JPH0644007Y2 (ja) 1994-11-14

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